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Tuesday, May 12, 2020 | History

1 edition of Nanoimprint lithography found in the catalog.

Nanoimprint lithography

Hongbo Lan

Nanoimprint lithography

principles, processes and materials

by Hongbo Lan

  • 57 Want to read
  • 29 Currently reading

Published by Nova Science Publishers, Inc. in New York .
Written in English

    Subjects:
  • Nanoelectronics,
  • Nanostructures,
  • Microlithography

  • Edition Notes

    Includes bibliographical references (p. [61]-68) and index.

    StatementHongbo Lan, Yucheng Ding and Hongzhong Liu
    ContributionsDing, Yucheng, 1961-, Liu, Hongzhong, 1971-
    Classifications
    LC ClassificationsTK7874.84 .L36 2011
    The Physical Object
    Paginationviii, 73 p. :
    Number of Pages73
    ID Numbers
    Open LibraryOL25051782M
    ISBN 109781611225013
    LC Control Number2010038653

    Title:Nanoimprint Lithography - the Past, the Present and the Future VOLUME: 12 ISSUE: 6 Author(s):Dongxu Wu, Nitul S. Rajput and Xichun Luo Affiliation:Centre for Precision Manufacturing, Department of Design, Manufacture and Engineering Management, University of Strathclyde, 75 Montrose Street, Glasgow G1 1XJ, UK. Keywords:Nanofabrication, nanoimprint lithography, Author: Dongxu Wu, Nitul S. Rajput, Xichun Luo. CNI – Compact Nanoimprint Tool; EZI – UV NIL Tool Holoprint UNI A6 DT; CT – Release Agent Treatment Tool PC – Plasma cleaning tool NIL Simulation Software Lithography & Processing Services. Electron Beam Lithography (EBL) Deep UV lithography (DUV) Nanoimprint Lithography; Anti-Sticking Coating; Masters. Masters by material.

    Hot Embossing Lithography (HEL) is a Nano Imprint Lithography (NIL) method using controlled temperature and pressure during the imprint process. It permits to replicate patterns which dimensions can be as small as few tens or hundreds of nanometers. Unless the substrate is itself a thermoplastic material, such as polycarbonate for instance, it is coated with the hot embossing material. Lithography (from Ancient Greek λίθος, lithos, meaning 'stone', and γράφειν, graphein, meaning 'to write') is a method of printing originally based on the immiscibility of oil and water. The printing is from a stone (lithographic limestone) or a metal plate with a smooth was invented in by German author and actor Alois Senefelder as a cheap method of publishing.

      Nanomanufacturing MOOC Project: 1. Brief History 2. What is Nanoimprint Lithography? 3. Types of Nanoimprint lithography 4. Comparison with others litho .   Since its introduction in , nanoimprint lithography has been demonstrated in many researches as a simple, low-cost, and high-throughput process for replicating micro- and nanoscale patterns. Due to its advantages, the nanoimprint lithography method has been rapidly developed over the years as a promising alternative to conventional nanolithography processes to fulfill the demands Cited by:


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Nanoimprint lithography by Hongbo Lan Download PDF EPUB FB2

Nanoimprint Lithography: An Enabling Process for Nanofabrication - Kindle edition by Zhou, Weimin. Download it once and read it on your Kindle device, PC, phones or tablets.

Use features like bookmarks, note taking and highlighting while reading Nanoimprint Lithography: Manufacturer: Springer. Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates 16 and 11 nm by: In book: Lithography.

Cite this publication as a novel nanoimprint technique with a self-aligned foldable imprint mold to control size and shape of structures and particles for a broad range.

This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography.

Nanoimprint Lithography - the Past, the Present and the Future Article (PDF Available) in Current Nanoscience 12(6) October with 2, Reads How we measure 'reads'. Imprint lithography is essentially a micromolding process in which the topography of a template defines the patterns created on a substrate.

When the printing is done at the nanoscale the various imprint methods are generally referred to as nanoimprint lithography (NIL). Nanoimprint lithography, commonly known as stamping, is another widely used technique capable of high-throughput large-area nanostructuring [79,80].The main advantage of nanoimprint lithography is that the fabricated nanostructure can have features much smaller than the wavelength of light with high precision at a low cost [81,82].The nanoimprint lithography process begins with pressing a.

The two most important nanoimprint lithography techniques hot embossing and UV -NIL are described in detail with application example s. This present book chapter focuses on the prin ciples and technologies of hot embossing and. Thermoplastic polymer micro- and nanostructures suffer pattern decay when heated to a temperature close to or above the polymer’s glass transition temperature.

In this work, we report enhanced thermal stability of polycarbonate nanostructures at temperatures well above their glass transition temperatures. Based on this observation, we develop a unique technique for high-resolution polymer Cited by: 3.

Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates 16 and 11 nm nodes. NanoImprint is a generic technology involving various approaches but keeping a common goal: the use of a stamp or mold to transfer a 2D or 3D pattern onto a surface or in a material’s thickness.

The key element of the process, the mold or stamp, is to NanoImprint what the mask is to optical lithography. Imprint lithography is a contact patterning method.

Projection optical lithography was developed as a replacement for optical contact printing, because defect levels were too high with contact printing to support high levels of integration.

It remains to be seen if yield problems will not be prohibitive with imprint lithography. References. Abstract. Nanoimprint lithography (NIL) is an emerging high-resolution parallel patterning method, mainly aimed towards fields in which electron-beam and high-end photolithography are costly and do not provide sufficient resolution at reasonable a top-down approach, a surface pattern of a stamp is replicated in a material by mechanical contact and three-dimensional material.

Nanoimprint lithography itself is also used to fabricate patterns onto the roller surface as observed in the work of Hwang et al., where a polyvinyl alcohol (PVA) replica of a silicon master is pressed against a roller surface coated with PDMS-based resin as shown in Figure This results in the patterns from the silicon master being Cited by: Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC).

This book gives fresh insight to NIL, one of the most promising low-cost. 23 Nanoimprint Lithography Hongbo Lan 1,2 and Yucheng Ding 2 1School of Mechanical Engineering, Shandong University, 2State Key Laboratory for Manufacturing System Engineering, Xi an Jiaotong University China 1.

Introduction The Nanoimprint lithography (NIL) is a novel method of fabricating micro/nanometer scale. "Nanoimprint lithography: from thermal embossing to roll-to-roll processing", 05/01//30/, A. del Campo, Eduard Arzt"Generating Micro- and Nanopatterns on Polymeric Surfaces", "book chapter".

Nanoimprint lithography (NIL) is a new way of nanopatterning and a revolutionary solution to patterns nanostructures by the physical deformation of. Chapter 2 NanoImprint Lithography 1 From printing to NanoImprint Today, printing has become a common thing thanks to several technological revolutions.

After the development of the first written forms - Selection from Nano Lithography [Book]. Free download of Nanoimprint Lithography by Hongbo Lan, Yucheng Ding. Available in PDF, ePub and Kindle. Read, write reviews and more. Download book all Read online books Search.

Search This Blog Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology) Download.Technology review and assessment of nanoimprint lithography for semiconductor and patterned media manufacturing Matt Malloy Lloyd C.

Litt Downloaded from SPIE .Optical Lithography (or photolithography) is one of the most important and prevalent sets of techniques in the nanolithography field.

Optical lithography contains several important derivative techniques, all that use very short light wavelengths in order to change the solubility of certain molecules, causing them to wash away in solution, leaving behind a desired structure.